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Specifications

static mode
spring constant @ 1,0µm cantilever thickness
- 23mN/m @ l=500µm
- 7mN/m @ l=750µm
- 3mN/m @ l=1000µm

dynamic mode
resonance frequency @ 5,0 mm cantilever thickness
- 24,3 kHz @ l=500µm
- 10,8 kHz @ l=750µm
- 6,1 kHz @ l=1000µm

Further cantilever dimensions
Thickness within one chip +- 50nm
Length variations +- 4µm
Cantilever witdh 90 +- 2µm
Pitch of cantilevers 250µm

You can choose between different sensor types and types of precision

The micromotive GmbH offers from planning through to series production, all steps in the use of micro technology for the production. www.micromotive.de

pricelist datasheet

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Chip-Typ	Mode	Precision	Length	Count	Coating

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